发明授权
- 专利标题: Electronic device
- 专利标题(中): 电子设备
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申请号: US11718137申请日: 2005-10-24
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公开(公告)号: US08203402B2公开(公告)日: 2012-06-19
- 发明人: Peter G. Steeneken , Jozef Thomas Martinus Van Beek , Theodoor Rijks
- 申请人: Peter G. Steeneken , Jozef Thomas Martinus Van Beek , Theodoor Rijks
- 申请人地址: DE Munich
- 专利权人: Epcos AG
- 当前专利权人: Epcos AG
- 当前专利权人地址: DE Munich
- 代理机构: Slater & Matsil, L.L.P.
- 国际申请: PCT/IB2005/053476 WO 20051024
- 国际公布: WO2006/046193 WO 20060504
- 主分类号: H01H51/22
- IPC分类号: H01H51/22
摘要:
The electronic device comprising a micro-electromechanical systems (MEMS) element at a first side of a substrate. The MEMS element includes a first electrode and a second electrode, that is part of a movable element and movable towards and from the first electrode between a first and a second position. The second electrode is separated from the first electrode by an air gap in its first position. The movable element includes a mechanical layer and an intermediate layer, in which the second electrode is defined. The second electrode is constituted by a plurality of sections in the intermediate layer, each of which is mechanically connected by a separate vertical interconnect to the mechanical layer.
公开/授权文献
- US20090211885A1 ELECTRONIC DEVICE 公开/授权日:2009-08-27
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