发明授权
US08205482B2 Hydrogen sensor with detection film comprised of rare earth metal particles dispersed in a ceramic 有权
具有由分散在陶瓷中的稀土金属颗粒构成的检测膜的氢传感器

  • 专利标题: Hydrogen sensor with detection film comprised of rare earth metal particles dispersed in a ceramic
  • 专利标题(中): 具有由分散在陶瓷中的稀土金属颗粒构成的检测膜的氢传感器
  • 申请号: US12521234
    申请日: 2007-12-28
  • 公开(公告)号: US08205482B2
    公开(公告)日: 2012-06-26
  • 发明人: Katsuhiko Fukui
  • 申请人: Katsuhiko Fukui
  • 申请人地址: JP Tokyo
  • 专利权人: Mikuni Corporation
  • 当前专利权人: Mikuni Corporation
  • 当前专利权人地址: JP Tokyo
  • 代理机构: Norris McLaughlin & Marcus P.A.
  • 优先权: JP2006-356334 20061228
  • 国际申请: PCT/JP2007/075261 WO 20071228
  • 国际公布: WO2008/081921 WO 20080710
  • 主分类号: G01N7/00
  • IPC分类号: G01N7/00
Hydrogen sensor with detection film comprised of rare earth metal particles dispersed in a ceramic
摘要:
A hydrogen sensor (100) is provided with a substrate (2), a detection film (4) formed on the substrate (2), and a hydrogen permeable protective film (10) formed on the detection film (4). The detection film (4) is composed of a first ceramic (6) and rare-earth metal particles (8) dispersed in the first ceramic (6). The protective film (10) is composed of a second ceramic (12) and hydrogen permeable metal particles (14) dispersed in the second ceramic (12). Preferably, the thickness of the detection film (4) is 5 to 1,000 nm, and the thickness of the hydrogen permeable protective film (10) is 5 to 40 nm.
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