发明授权
US08211729B2 Method for releasing the suspended structure of a NEMS and/or NEMS component
有权
释放NEMS和/或NEMS组件的挂起结构的方法
- 专利标题: Method for releasing the suspended structure of a NEMS and/or NEMS component
- 专利标题(中): 释放NEMS和/或NEMS组件的挂起结构的方法
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申请号: US12793156申请日: 2010-06-03
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公开(公告)号: US08211729B2公开(公告)日: 2012-07-03
- 发明人: Cecilia Dupre , Philippe Robert
- 申请人: Cecilia Dupre , Philippe Robert
- 申请人地址: FR Paris
- 专利权人: Commissariat a l'energie atomique et aux energies alternatives
- 当前专利权人: Commissariat a l'energie atomique et aux energies alternatives
- 当前专利权人地址: FR Paris
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: FR0953976 20090615
- 主分类号: H01L21/302
- IPC分类号: H01L21/302
摘要:
A method for making a microelectronic device comprising at least one electromechanical component provided with a mobile structure, the method comprising the steps of: forming in at least one fine semiconducting thin layer lying on a supporting layer, at least one bar bound to a block, said bar being intended to form a mobile structure of an electromechanical component, withdrawing a portion of the supporting layer under said bar, forming at least one passivation layer based on dielectric material around said bar, forming an encapsulation layer around the bar and covering said passivation layer, the method further comprising steps of: making metal contact and/or interconnection areas, and then suppressing the encapsulation layer around said bar.
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