发明授权
- 专利标题: High optical efficiency CMOS image sensor
- 专利标题(中): 高光效CMOS图像传感器
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申请号: US13010800申请日: 2011-01-21
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公开(公告)号: US08212297B1公开(公告)日: 2012-07-03
- 发明人: Pui Chung Simon Law , Dan Yang , Xunqing Shi
- 申请人: Pui Chung Simon Law , Dan Yang , Xunqing Shi
- 申请人地址: CN Hong Kong Science Park, Shatin, New Territories, Hong Kong
- 专利权人: Hong Kong Applied Science and Technology Research Institute Company Limited
- 当前专利权人: Hong Kong Applied Science and Technology Research Institute Company Limited
- 当前专利权人地址: CN Hong Kong Science Park, Shatin, New Territories, Hong Kong
- 代理机构: Ella Cheong Hong Kong
- 代理商 Margaret A. Burke; Sam T. Yip
- 主分类号: H01L31/062
- IPC分类号: H01L31/062
摘要:
High optical efficiency CMOS image sensors capable of sustaining pixel sizes less than 1.2 microns are provided. Due to high photodiode fill factors and efficient optical isolation, microlenses are unnecessary. Each sensor includes plural imaging pixels having a photodiode structure on a semiconductor substrate adjacent a light-incident upper surface of the image sensor. An optical isolation grid surrounds each photodiode structure and defines the pixel boundary. The optical isolation grid extends to a depth of at least the thickness of the photodiode structure and prevents incident light from penetrating through the incident pixel to an adjacent pixel. A positive diffusion plug vertically extends through a portion of the photodiode structure. A negative diffusion plug vertically extends into the semiconductor substrate for transferring charge generated in the photodiode to a charge collecting region within the semiconductor substrate. Pixel circuitry positioned beneath the photodiode controls charge transfer to image readout circuitry.
公开/授权文献
- US20120187462A1 HIGH OPTICAL EFFICIENCY CMOS IMAGE SENSOR 公开/授权日:2012-07-26
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