发明授权
- 专利标题： Micro-electromechanical resonance device with periodic structure
- 专利标题（中）： 具有周期性结构的微机电共振装置
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申请号： US12419125申请日： 2009-04-06
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公开(公告)号： US08212324B2公开(公告)日： 2012-07-03
- 发明人: Gregory Caruyer , Karim Segueni , Pascal Ancey , Bertrand Dubus
- 申请人： Gregory Caruyer , Karim Segueni , Pascal Ancey , Bertrand Dubus
- 申请人地址： FR Montrouge
- 专利权人： STMicroelectronics SA
- 当前专利权人： STMicroelectronics SA
- 当前专利权人地址： FR Montrouge
- 代理机构： Allen, Dyer, Doppelt, Milbrath & Gilchrist, P.A.
- 优先权： FR0852316 20080407
- 主分类号： H01L29/84
- IPC分类号： H01L29/84 ; H01L21/00
摘要：
A Micro Electro Mechanical Systems resonance device includes a substrate, and an input electrode, connected to an alternating current source having an input frequency. The device also includes an output electrode, and at least one anchoring structure, connected to the substrate. The device further includes a vibratile structure connected to an anchoring structure by at least one junction, having a natural acoustic resonant frequency. The vibration under the effect of the input electrode, when it is powered, generates, on the output electrode, an alternating current wherein the output frequency is equal to the natural frequency. The vibratile structure and/or the anchoring structure includes a periodic structure. The periodic structure includes at least first and second zones different from each other, and corresponding respectively to first and second acoustic propagation properties.