发明授权
- 专利标题: Piezoelectric/electrostrictive film element and method manufacturing the same
- 专利标题(中): 压电/电致伸缩膜元件及其制造方法
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申请号: US12358559申请日: 2009-01-23
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公开(公告)号: US08212455B2公开(公告)日: 2012-07-03
- 发明人: Yukinobu Yura , Shohei Yokoyama , Nobuyuki Kobayashi , Tsutomu Nanataki
- 申请人: Yukinobu Yura , Shohei Yokoyama , Nobuyuki Kobayashi , Tsutomu Nanataki
- 申请人地址: JP Nagoya
- 专利权人: NGK Insulators, Ltd.
- 当前专利权人: NGK Insulators, Ltd.
- 当前专利权人地址: JP Nagoya
- 代理机构: Burr & Brown
- 优先权: JP2008-019717 20080130; JP2008-074427 20080321; JP2008-152099 20080610; JP2008-152100 20080610; JP2008-303236 20081127
- 主分类号: H01L41/08
- IPC分类号: H01L41/08
摘要:
An actuator includes a fired ceramic substrate having a space opened downward, a first electrode formed on the upper surface of the fired ceramic substrate above the space, a piezoelectric/electrostrictive body formed on the first electrode so that the volume changes with input and output of electric power, and a second electrode formed on the piezoelectric/electrostrictive body. The piezoelectric/electrostrictive body is composed of Pb(Zr1-xTix)O3 or (Li, Na, K) (Nb, Ta)O3 as a main component and contains crystals oriented along the direction of an electric field. In the actuator, the degree of orientation of the piezoelectric/electrostrictive body can be increased regardless of the orientation of the substrate on which the piezoelectric/electrostrictive body is formed.