发明授权
- 专利标题: Adhering matter inspection equipment and method for inspecting adhering method
- 专利标题(中): 附着物检查设备及检验方法
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申请号: US11908516申请日: 2005-03-14
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公开(公告)号: US08217339B2公开(公告)日: 2012-07-10
- 发明人: Hideo Kashima , Yasuaki Takada , Izumi Waki
- 申请人: Hideo Kashima , Yasuaki Takada , Izumi Waki
- 申请人地址: JP Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Antonelli, Terry, Stout & Kraus, LLP.
- 国际申请: PCT/JP2005/004461 WO 20050314
- 国际公布: WO2006/097990 WO 20060921
- 主分类号: H01J49/26
- IPC分类号: H01J49/26 ; G01N30/72
摘要:
A technology for collecting a granular substance adhering to a baggage with high rate without touching the substance and inspecting whether a dangerous or specific sample material is adhered to the baggage. A method for simplifying or automating such an inspection is also provided. An adhering matter inspection equipment (1) is characterized in that the equipment comprises a collecting section (5) for collecting a sample material peeled off from an inspection object (25) whereupon the sample material is adhered by blowing compression gas through a capturing filter (52), and an inspecting section (2) for analyzing the sample material captured by the capturing filter (52), and further characterized in that the inspection equipment comprises a section (3) for delivering a baggage to the inspecting section (2), and a carrying section (4) for carrying the capturing filter (52) from the capturing section (5) to the inspecting section (2).