发明授权
- 专利标题： Scanner device for scanning probe microscope
- 专利标题（中）： 用于扫描探针显微镜的扫描仪
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申请号： US12995875申请日： 2009-05-29
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公开(公告)号： US08217367B2公开(公告)日： 2012-07-10
- 发明人: Takeshi Fukuma , Toshio Ando , Yasutaka Okazaki
- 申请人： Takeshi Fukuma , Toshio Ando , Yasutaka Okazaki
- 申请人地址： JP Ishikawa
- 专利权人： National University Corporation Kanazawa University
- 当前专利权人： National University Corporation Kanazawa University
- 当前专利权人地址： JP Ishikawa
- 代理机构： Pearne & Gordon LLP
- 优先权： JP2008-147041 20080604
- 国际申请： PCT/JP2009/002381 WO 20090529
- 国际公布： WO2009/147807 WO 20091210
- 主分类号： G01Q10/00
- IPC分类号： G01Q10/00
摘要：
A scanner device is provided which enables high-frequency scanning and can increase the speed of a scanning probe microscope. A scanner device (1) used for a scanning probe microscope includes a Z actuator (7) which scans an object to be scanned in a scanning direction, and a Z actuator holder (11) which holds the Z actuator (7). The Z actuator holder (11) holds the Z actuator (7) at a plurality of holding line parts which extend in the scanning direction and are separated from each other. For example, the Z actuator (7) has a rectangular cross-section, and the four edges of the Z actuator (7) are held by the Z actuator holder (11). The Z actuator (7) is pressed into a holding hole (29) of the Z actuator holder (11).
公开/授权文献
- US20110093989A1 SCANNER DEVICE FOR SCANNING PROBE MICROSCOPE 公开/授权日：2011-04-21
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