发明授权
- 专利标题： Two-terminal variable capacitance MEMS device
- 专利标题（中）： 双端可变电容MEMS器件
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申请号： US12642421申请日： 2009-12-18
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公开(公告)号： US08218228B2公开(公告)日： 2012-07-10
- 发明人: Je-Hsiung Lan , Evgeni Gousev , Ernest Tadashi Ozaki
- 申请人： Je-Hsiung Lan , Evgeni Gousev , Ernest Tadashi Ozaki
- 申请人地址： US CA San Diego
- 专利权人： Qualcomm MEMS Technologies, Inc.
- 当前专利权人： Qualcomm MEMS Technologies, Inc.
- 当前专利权人地址： US CA San Diego
- 代理机构： Weaver Austin Villeneuve and Sampson LLP
- 主分类号： G02B26/00
- IPC分类号： G02B26/00
摘要：
A two-terminal, variable capacitance device is described that is constructed by connecting multiple MEMS devices having different actuation or “pull in” voltages in parallel.
公开/授权文献
- US20110149374A1 TWO-TERMINAL VARIABLE CAPACITANCE MEMS DEVICE 公开/授权日：2011-06-23