发明授权
US08220310B2 Gas analyzer and method of gas analysis 有权
气体分析仪和气体分析方法

Gas analyzer and method of gas analysis
摘要:
A gas analyzer that can be miniaturized and detect a wide variety of gases with high sensitivity, and a method of gas analysis. A separation column is configured so as to pass a sample gas together with a carrier gas through the inside thereof. A surface acoustic wave device has a base material with an annularly continuous annular surface formed of at least a part of a spherical surface; a surface acoustic wave generating means capable of generating a surface acoustic wave that propagates along the annular surface; and a plurality of reaction parts provided along the annular surface so as to change a predetermined physical quantity of the surface acoustic wave in response to the components of the sample gas. The surface acoustic wave device is arranged so that the sample gas passing through the separation column is reacted with the reaction parts. The measuring part can measure a physical quantity of the surface acoustic wave propagating along the annular surface, and the components of the sample gas can be analyzed on the basis of the measured physical quantity.
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