发明授权
- 专利标题： Apparatus for producing a reflector
- 专利标题（中）： 用于制造反射器的装置
-
申请号： US12307312申请日： 2007-06-07
-
公开(公告)号： US08221551B2公开(公告)日： 2012-07-17
- 发明人: Masayuki Iljima , Yosuke Kobayashi , Kouji Hirayama , Yusuke Hashimoto , Ryuji Hamada , Ken Momono , Atsushi Nakatsuka
- 申请人： Masayuki Iljima , Yosuke Kobayashi , Kouji Hirayama , Yusuke Hashimoto , Ryuji Hamada , Ken Momono , Atsushi Nakatsuka
- 申请人地址： JP Kanagawa
- 专利权人： Ulvac, Inc.
- 当前专利权人： Ulvac, Inc.
- 当前专利权人地址： JP Kanagawa
- 代理机构： Harness Dickey & Pierce, PLC
- 优先权： JP2006-184018 20060704
- 国际申请： PCT/JP2007/061528 WO 20070607
- 国际公布： WO2008/004397 WO 20080110
- 主分类号： B01J19/08
- IPC分类号： B01J19/08 ; C23C16/54
摘要：
Provided is a deposition apparatus that has a metal evaporation source for depositing a reflective layer, a pigment evaporation source for depositing a coloring layer, and a plasma polymerization source (electrode) for depositing a protective layer disposed inside a single vacuum processing room. By carrying out a step of depositing the reflective layer, a step of depositing the coloring layer, and a step of depositing the protective layer in the common vacuum processing room, processes can be simplified and an operation time can be reduced.
公开/授权文献
- US20090208664A1 APPARATUS AND METHOD FOR PRODUCING A REFLECTOR 公开/授权日：2009-08-20
信息查询
