Invention Grant
- Patent Title: Apparatus for producing a reflector
- Patent Title (中): 用于制造反射器的装置
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Application No.: US12307312Application Date: 2007-06-07
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Publication No.: US08221551B2Publication Date: 2012-07-17
- Inventor: Masayuki Iljima , Yosuke Kobayashi , Kouji Hirayama , Yusuke Hashimoto , Ryuji Hamada , Ken Momono , Atsushi Nakatsuka
- Applicant: Masayuki Iljima , Yosuke Kobayashi , Kouji Hirayama , Yusuke Hashimoto , Ryuji Hamada , Ken Momono , Atsushi Nakatsuka
- Applicant Address: JP Kanagawa
- Assignee: Ulvac, Inc.
- Current Assignee: Ulvac, Inc.
- Current Assignee Address: JP Kanagawa
- Agency: Harness Dickey & Pierce, PLC
- Priority: JP2006-184018 20060704
- International Application: PCT/JP2007/061528 WO 20070607
- International Announcement: WO2008/004397 WO 20080110
- Main IPC: B01J19/08
- IPC: B01J19/08 ; C23C16/54
Abstract:
Provided is a deposition apparatus that has a metal evaporation source for depositing a reflective layer, a pigment evaporation source for depositing a coloring layer, and a plasma polymerization source (electrode) for depositing a protective layer disposed inside a single vacuum processing room. By carrying out a step of depositing the reflective layer, a step of depositing the coloring layer, and a step of depositing the protective layer in the common vacuum processing room, processes can be simplified and an operation time can be reduced.
Public/Granted literature
- US20090208664A1 APPARATUS AND METHOD FOR PRODUCING A REFLECTOR Public/Granted day:2009-08-20
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