Invention Grant
- Patent Title: Apparatus for producing trichlorosilane
- Patent Title (中): 三氯硅烷生产设备
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Application No.: US12312471Application Date: 2007-10-25
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Publication No.: US08221691B2Publication Date: 2012-07-17
- Inventor: Mitsutoshi Narukawa , Yuji Shimizu
- Applicant: Mitsutoshi Narukawa , Yuji Shimizu
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: Mitsubishi Materials Corporation,Denki Kagaku Kogyo Kabushiki Kaisha
- Current Assignee: Mitsubishi Materials Corporation,Denki Kagaku Kogyo Kabushiki Kaisha
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Edwards Wildman Palmer LLP
- Priority: JP2006-314896 20061121; JP2007-268617 20071016
- International Application: PCT/JP2007/070805 WO 20071025
- International Announcement: WO2008/062632 WO 20080529
- Main IPC: B01J19/00
- IPC: B01J19/00 ; B01J8/02

Abstract:
An apparatus for producing trichlorosilane includes a reaction container in which a supply gas containing silicon tetrachloride and hydrogen is supplied therein and a reaction product gas containing trichlorosilane and hydrogen chloride is produced; a heat transfer body which is filled in the reaction container, which is formed of a material having a melting point of at least higher than 1,400° C., and which has a void part which enables a gas to be passed; and a heating mechanism heating the heat transfer body in the reaction container.
Public/Granted literature
- US20100061901A1 APPARATUS FOR PRODUCING TRICHLOROSILANE Public/Granted day:2010-03-11
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