发明授权
- 专利标题： Crack free multilayered devices, methods of manufacture thereof and articles comprising the same
- 专利标题（中）： 无裂纹多层器件及其制造方法及其制品
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申请号： US12861614申请日： 2010-08-23
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公开(公告)号： US08222057B2公开(公告)日： 2012-07-17
- 发明人: Olga Kryliouk , Timothy J. Anderson
- 申请人： Olga Kryliouk , Timothy J. Anderson
- 申请人地址： US FL Gainesville
- 专利权人： University of Florida Research Foundation, Inc.
- 当前专利权人： University of Florida Research Foundation, Inc.
- 当前专利权人地址： US FL Gainesville
- 代理机构： Cantor Colburn LLP
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
Disclosed herein is an article comprising a substrate; an interlayer comprising aluminum nitride, gallium nitride, boron nitride, indium nitride or a solid solution of aluminum nitride, gallium nitride, boron nitride and/or indium nitride; the interlayer being directly disposed upon the substrate and in contact with the substrate; where the interlayer comprises a columnar film and/or nanorods and/or nanotubes; and a group-III nitride layer disposed upon the interlayer; where the group-III nitride layer completely covers a surface of the interlayer that is opposed to a surface in contact with the substrate; the group-III nitride layer being free from cracks.
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