Invention Grant
- Patent Title: Method for manufacturing solar cell
- Patent Title (中): 制造太阳能电池的方法
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Application No.: US12893944Application Date: 2010-09-29
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Publication No.: US08222129B2Publication Date: 2012-07-17
- Inventor: Young Su Kim , Doo-Youl Lee
- Applicant: Young Su Kim , Doo-Youl Lee
- Applicant Address: KR Suwon-si, Gyeonggi-do KR Yongin-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.,Samsung SDI Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.,Samsung SDI Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do KR Yongin-si, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2010-0055435 20100611
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/22

Abstract:
A method for manufacturing a solar cell according to an exemplary embodiment includes: forming a first doping film on a substrate; patterning the first doping film so as to form a first doping film pattern and so as to expose a portion of the substrate; forming a diffusion prevention film on the first doping film pattern so as to cover the exposed portion of the substrate; etching the diffusion prevention film so as to form spacers on lateral surfaces of the first doping film pattern; forming a second doping film on the first doping film pattern so as to cover the spacer and exposed substrate; forming a first doping region on the substrate surface by diffusing an impurity from the first doping film pattern into the substrate; and forming a second doping region on the substrate surface by diffusing an impurity from the second doping film pattern into the substrate.
Public/Granted literature
- US20110306164A1 METHOD FOR MANUFACTURING SOLAR CELL Public/Granted day:2011-12-15
Information query
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