发明授权
- 专利标题： Measuring apparatus and exposure apparatus having the same
- 专利标题（中）： 测量装置和具有该测量装置的曝光装置
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申请号： US12434095申请日： 2009-05-01
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公开(公告)号： US08223315B2公开(公告)日： 2012-07-17
- 发明人: Yumiko Ohsaki
- 申请人： Yumiko Ohsaki
- 申请人地址： JP Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JP Tokyo
- 代理机构： Fitzpatrick, Cella, Harper & Scinto
- 优先权： JP2005-040271 20050217
- 主分类号： G03B27/52
- IPC分类号： G03B27/52 ; G03B27/72
摘要：
A measuring apparatus for measuring an optical performance of an optical system under test that has a numerical aperture of more than 0.6 at a light exit side, said measuring apparatus includes a numerical aperture decreasing part for decreasing the numerical aperture of a light exited from the optical system under test to 0.6 or less, and a detector for detecting an interference fringes formed by the light that passes through the numerical aperture decreasing part.
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