Invention Grant
- Patent Title: Workpiece gripping integrity sensor
- Patent Title (中): 工件夹紧完整性传感器
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Application No.: US12178014Application Date: 2008-07-23
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Publication No.: US08226142B2Publication Date: 2012-07-24
- Inventor: Joseph D. Gillespie , Sor Kham , Robert E. Wayne
- Applicant: Joseph D. Gillespie , Sor Kham , Robert E. Wayne
- Applicant Address: US MA Beverly
- Assignee: Axcelis Technologies, Inc.
- Current Assignee: Axcelis Technologies, Inc.
- Current Assignee Address: US MA Beverly
- Agency: Eschweiler & Associates, LLC
- Main IPC: B66F19/00
- IPC: B66F19/00

Abstract:
A workpiece gripping integrity device and method are provided having a charge-transfer sensing device configured to detect a change in charge associated with a gripper arm assembly based on a grip condition thereof. The charge-transfer sensing device can be configured to detect a change in capacitance between the gripper arm assembly and ground, wherein the change in capacitance is based on a grip condition of the gripper arm assembly associated with a plurality of grippers contacting the workpiece.
Public/Granted literature
- US20090039664A1 WORKPIECE GRIPPING INTEGRITY SENSOR Public/Granted day:2009-02-12
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