Invention Grant
US08226795B2 Magnetic clips and substrate holders for use in a plasma processing system
有权
用于等离子体处理系统的磁性夹子和衬底保持器
- Patent Title: Magnetic clips and substrate holders for use in a plasma processing system
- Patent Title (中): 用于等离子体处理系统的磁性夹子和衬底保持器
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Application No.: US12364888Application Date: 2009-02-03
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Publication No.: US08226795B2Publication Date: 2012-07-24
- Inventor: William J. Brass , Louis Fierro , James D. Getty
- Applicant: William J. Brass , Louis Fierro , James D. Getty
- Applicant Address: US OH Westlake
- Assignee: Nordson Corporation
- Current Assignee: Nordson Corporation
- Current Assignee Address: US OH Westlake
- Agency: Wood, Herron & Evans, LLP
- Main IPC: H01F7/20
- IPC: H01F7/20

Abstract:
Magnetic clips for use with a substrate holder for holding a substrate in a processing chamber of a plasma treatment system. The clip includes first and second body members each having a clamping surface and a magnet. The first body member is configured to be mechanically connected with the substrate holder. The second body member is pivotally connected by a hinge with the first body member for movement relative to the first body member between closed and opened positions. In the closed position, an edge region of the substrate is positioned between the clamping surfaces. In the opened position, the edge region is released. The magnet on the second body member magnetically attracts the magnet on the first body member, when the second body member is in the closed position, to apply a force that restrains movement of the edge region of the substrate relative to the clamping surfaces.
Public/Granted literature
- US20100194505A1 MAGNETIC CLIPS AND SUBSTRATE HOLDERS FOR USE IN A PLASMA PROCESSING SYSTEM Public/Granted day:2010-08-05
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