发明授权
US08226838B2 Method of forming polymer features by directed self-assembly of block copolymers
有权
通过嵌段共聚物的定向自组装形成聚合物特征的方法
- 专利标题: Method of forming polymer features by directed self-assembly of block copolymers
- 专利标题(中): 通过嵌段共聚物的定向自组装形成聚合物特征的方法
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申请号: US12061693申请日: 2008-04-03
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公开(公告)号: US08226838B2公开(公告)日: 2012-07-24
- 发明人: Joy Cheng , William D. Hinsberg , Ho-Cheol Kim , Charles T. Rettner , Daniel P. Sanders
- 申请人: Joy Cheng , William D. Hinsberg , Ho-Cheol Kim , Charles T. Rettner , Daniel P. Sanders
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Cantor Colburn LLP
- 主分类号: C03C15/00
- IPC分类号: C03C15/00
摘要:
Disclosed are methods of forming polymer structures comprising: applying a solution of a block copolymer assembly comprising at least one block copolymer to a neutral substrate having a chemical pattern thereon, the chemical pattern comprising alternating pinning and neutral regions that are chemically distinct and have a first spatial frequency given by the number of paired sets of pinning and neutral regions along a given direction on the substrate; and forming domains of the block copolymer that form by lateral segregation of the blocks in accordance with the underlying chemical pattern, wherein at least one domain of the block copolymer assembly has an affinity for the pinning regions, wherein a structure extending across the chemical pattern is produced, the structure having a uniform second spatial frequency given by the number of repeating sets of domains along the given direction that is at least twice that of the first spatial frequency.
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