Invention Grant
- Patent Title: Removal of a sheet from a production apparatus
- Patent Title (中): 从生产设备中取出纸张
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Application No.: US13187039Application Date: 2011-07-20
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Publication No.: US08226903B2Publication Date: 2012-07-24
- Inventor: Peter L. Kellerman , Frederick Carlson , Frank Sinclair
- Applicant: Peter L. Kellerman , Frederick Carlson , Frank Sinclair
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: B01D11/02
- IPC: B01D11/02
Abstract:
A melt of a material is cooled and a sheet of the material is formed in the melt. This sheet is transported, cut into at least one segment, and cooled in a cooling chamber. The material may be Si, Si and Ge, Ga, or GaN. The cooling is configured to prevent stress or strain to the segment. In one instance, the cooling chamber has gas cooling.
Public/Granted literature
- US20110271901A1 REMOVAL OF A SHEET FROM A PRODUCTION APPARATUS Public/Granted day:2011-11-10
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