发明授权
US08227808B2 Method for manufacturing thin film transistor (TFT) and OLED display having TFTS manufactured by the same
有权
用于制造具有由其制造的TFTS的薄膜晶体管(TFT)和OLED显示器的方法
- 专利标题: Method for manufacturing thin film transistor (TFT) and OLED display having TFTS manufactured by the same
- 专利标题(中): 用于制造具有由其制造的TFTS的薄膜晶体管(TFT)和OLED显示器的方法
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申请号: US12277041申请日: 2008-11-24
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公开(公告)号: US08227808B2公开(公告)日: 2012-07-24
- 发明人: Te-Chang Wan , Yu-Chung Liu , Te-Yu Lee
- 申请人: Te-Chang Wan , Yu-Chung Liu , Te-Yu Lee
- 申请人地址: TW Miao-Li County
- 专利权人: Chimei Innolux Corporation
- 当前专利权人: Chimei Innolux Corporation
- 当前专利权人地址: TW Miao-Li County
- 代理机构: Morris Manning & Martin LLP
- 代理商 Tim Tingkang Xia, Esq.
- 优先权: TW97114510A 20080421
- 主分类号: H01L27/108
- IPC分类号: H01L27/108
摘要:
An organic light emitting diode (OLED) display and thin film transistor (TFT) manufacturing method thereof are disclosed. According to the present invention, poly-silicon layers for forming active areas of non-driving TFT (e.g. peripheral circuit TFT and switch TFT) and driving TFT used in the OLED display are respectively made by using standard laser crystallization method and non-laser crystallization method or low energy laser crystallization method. Therefore, the peripheral circuit TFT has excellent electrical performance such as high carrier mobility, while the OLED-driving TFT has good stability so that the resultant display can operate with improved luminance uniformity.
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