Invention Grant
- Patent Title: Microwave supplying apparatus and microwave plasma system
- Patent Title (中): 微波供应装置和微波等离子体系统
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Application No.: US12646981Application Date: 2009-12-24
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Publication No.: US08228007B2Publication Date: 2012-07-24
- Inventor: Chung-Chun Huang , Tsun-Hsu Chang , Bo-Hung Lin , Chi-Wen Hu
- Applicant: Chung-Chun Huang , Tsun-Hsu Chang , Bo-Hung Lin , Chi-Wen Hu
- Applicant Address: TW Taoyuan County TW Taoyuan County
- Assignee: Chung-Shan Institute of Science and Technology,Armaments Bureau, Ministry of National Defense
- Current Assignee: Chung-Shan Institute of Science and Technology,Armaments Bureau, Ministry of National Defense
- Current Assignee Address: TW Taoyuan County TW Taoyuan County
- Main IPC: H01J25/00
- IPC: H01J25/00

Abstract:
The invention discloses a microwave supplying apparatus including a microwave generator, a first power divider, a second power divider, a first waveguide, and a second wave guide. The first waveguide is connected to the microwave generator and has a first output terminal and a second output terminal to divide a microwave generated by the microwave generator along a first direction. The second power divider is connected to the first output terminal and has a third output terminal and a fourth output terminal to divide the microwave along a second direction. The first waveguide and the second waveguide are connected to the third output terminal and the fourth terminal respectively and receive the microwave through the first power divider and the second power divider to respectively output the microwave fields with approximate intensity distributions.
Public/Granted literature
- US20110156838A1 MICROWAVE SUPPLYING APPARATUS AND MICROWAVE PLASMA SYSTEM Public/Granted day:2011-06-30
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