发明授权
US08230582B2 Methods of making magnetic write heads with use of a resist channel shrinking solution having corrosion inhibitors
失效
使用具有腐蚀抑制剂的抗蚀剂通道收缩溶液制造磁性写入头的方法
- 专利标题： Methods of making magnetic write heads with use of a resist channel shrinking solution having corrosion inhibitors
- 专利标题（中）： 使用具有腐蚀抑制剂的抗蚀剂通道收缩溶液制造磁性写入头的方法
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申请号： US12685455申请日： 2010-01-11
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公开(公告)号： US08230582B2公开(公告)日： 2012-07-31
- 发明人: Christian Rene Bonhote , Jila Tabib , Dennis Richard Mckean , Daniel Wayne Bedell , Jyh-Shuey Lo , Heiu Lam , Kim Y Lee
- 申请人： Christian Rene Bonhote , Jila Tabib , Dennis Richard Mckean , Daniel Wayne Bedell , Jyh-Shuey Lo , Heiu Lam , Kim Y Lee
- 申请人地址： NL Amsterdam
- 专利权人： HGST Netherlands B.V.
- 当前专利权人： HGST Netherlands B.V.
- 当前专利权人地址： NL Amsterdam
- 代理商 John J. Oskorep, Esq.; Darren Gold
- 主分类号： G11B5/127
- IPC分类号： G11B5/127 ; H04R31/00
摘要：
One preferred method for use in making a device structure with use of the resist channel shrinking solution includes the steps of forming a first pedestal portion within a channel of a patterned resist; applying a resist channel shrinking solution comprising a resist channel shrinking film and corrosion inhibitors within the channel of the patterned resist; baking the resist channel shrinking solution over the patterned resist to thereby reduce a width of the channel of the patterned resist; removing the resist channel shrinking solution; and forming a second pedestal portion within the reduced-width channel of the patterned resist. Advantageously, the oxide layer and the corrosion inhibitors of the resist channel shrinking solution reduce corrosion in the pedestal during the act of baking the resist channel shrinking solution.