发明授权
- 专利标题： Aluminum oxide sintered body, method for producing the same and member for semiconductor producing apparatus
- 专利标题（中）： 氧化铝烧结体及其制造方法以及半导体制造装置用部件
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申请号： US12717164申请日： 2010-03-04
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公开(公告)号： US08231964B2公开(公告)日： 2012-07-31
- 发明人: Naomi Teratani , Yuji Katsuda
- 申请人： Naomi Teratani , Yuji Katsuda
- 申请人地址： JP Nagoya
- 专利权人： NGK Insulators, Ltd.
- 当前专利权人： NGK Insulators, Ltd.
- 当前专利权人地址： JP Nagoya
- 代理机构： Burr & Brown
- 优先权： JP2009-054027 20090306
- 主分类号： C04B35/10
- IPC分类号： C04B35/10
摘要：
An aluminum oxide sintered body is provided, including europium and nitrogen, and plate-like crystals having peaks coinciding with EuAl12O19 in an X-ray diffraction profile are dispersed over a whole sintered body. Such an aluminum oxide sintered body can be obtained by forming a mixed powder containing an alumina powder, a europium compound powder and an aluminum nitride powder into a green body having a predetermined shape, and sintering the green body under a non-oxidizing atmosphere.