Invention Grant
- Patent Title: Bulk substrate FET integrated on CMOS SOI
- Patent Title (中): 集成在CMOS SOI上的散装衬底FET
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Application No.: US12683456Application Date: 2010-01-07
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Publication No.: US08232599B2Publication Date: 2012-07-31
- Inventor: Anthony I. Chou , Arvind Kumar , Shreesh Narasimha , Ning Su , Huiling Shang
- Applicant: Anthony I. Chou , Arvind Kumar , Shreesh Narasimha , Ning Su , Huiling Shang
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Joseph Petrokaitis
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/86

Abstract:
An integrated circuit is provided that integrates an bulk FET and an SOI FET on the same chip, where the bulk FET includes a gate conductor over a gate oxide formed over a bulk substrate, where the gate dielectric of the bulk FET has the same thickness and is substantially coplanar with the buried insulating layer of the SOI FET. In a preferred embodiment, the bulk FET is formed from an SOI wafer by forming bulk contact trenches through the SOI layer and the buried insulating layer of the SOI wafer adjacent an active region of the SOI layer in a designated bulk device region. The active region of the SOI layer adjacent the bulk contact trenches forms the gate conductor of the bulk FET which overlies a portion of the underlying buried insulating layer, which forms the gate dielectric of the bulk FET.
Public/Granted literature
- US20110163383A1 BULK SUBSTRATE FET INTEGRATED ON CMOS SOI Public/Granted day:2011-07-07
Information query
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