Invention Grant
US08232711B2 Surface emission type electron source and drawing device 有权
表面发射型电子源和拉丝装置

  • Patent Title: Surface emission type electron source and drawing device
  • Patent Title (中): 表面发射型电子源和拉丝装置
  • Application No.: US12597035
    Application Date: 2008-04-23
  • Publication No.: US08232711B2
    Publication Date: 2012-07-31
  • Inventor: Akira KojimaHideyuki Ohyi
  • Applicant: Akira KojimaHideyuki Ohyi
  • Applicant Address: JP Tokyo
  • Assignee: Crestec Corporation
  • Current Assignee: Crestec Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Dickstein Shapiro LLP
  • Priority: JP2007-115471 20070425; JP2007-207887 20070809
  • International Application: PCT/JP2008/057852 WO 20080423
  • International Announcement: WO2008/133275 WO 20081106
  • Main IPC: H01J1/02
  • IPC: H01J1/02
Surface emission type electron source and drawing device
Abstract:
A surface emission type electron source including a first electrode having a planar form, a second electrode having a planar form facing the first electrode, an electron passage layer disposed between the first electrode and the second electrode, an insulator or semiconductor layer between the second electrode and the electron passage layer, and a power source part configured to apply a voltage to the second electrode and the first electrode. The electron passage layer includes plural quantum wires extending in a first direction from the first electrode to the second electrode. The quantum wires are made of silicon and spaced apart from each other at predetermined intervals, and electrons are emitted from a front surface of the second electrode. Protrusions protruding toward leading ends of the quantum wires are formed on a back surface of the second electrode at positions corresponding to the quantum wires.
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