发明授权
US08235062B2 Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation
有权
使用易于在打开和关闭操作模式之间转换的处理室设计来处理微电子工件的工具和方法
- 专利标题: Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation
- 专利标题(中): 使用易于在打开和关闭操作模式之间转换的处理室设计来处理微电子工件的工具和方法
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申请号: US12387607申请日: 2009-05-05
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公开(公告)号: US08235062B2公开(公告)日: 2012-08-07
- 发明人: Jeffrey M. Lauerhaas , Jimmy D. Collins , Tracy A. Gast , Alan D. Rose
- 申请人: Jeffrey M. Lauerhaas , Jimmy D. Collins , Tracy A. Gast , Alan D. Rose
- 申请人地址: US MN Chaska
- 专利权人: FSI International, Inc.
- 当前专利权人: FSI International, Inc.
- 当前专利权人地址: US MN Chaska
- 代理机构: Kagan Binder, PLLC
- 主分类号: B05B13/00
- IPC分类号: B05B13/00
摘要:
Strategies for tool designs and their uses wherein the tools can operate in either closed or open modes of operation. The tools easily transition between open and closed modes on demand. According to one general strategy, environmentally controlled pathway(s) couple the ambient to one or more process chambers. Air amplification capabilities upstream from the process chamber(s) allow substantial flows of air to be introduced into the process chamber(s) on demand. Alternatively, the fluid pathways are easily closed, such as by simple valve actuation, to block egress to the ambient through these pathways. Alternative flows of nonambient fluids can then be introduced into the process chamber(s) via pathways that are at least partially in common with the pathways used for ambient air introduction. In other strategies, gap(s) between moveable components are sealed at least with flowing gas curtains rather than by relying only upon direct physical contact for sealing.
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