Invention Grant
- Patent Title: Apparatus for multiple frequency power application
- Patent Title (中): 多频电源设备
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Application No.: US13205933Application Date: 2011-08-09
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Publication No.: US08237517B2Publication Date: 2012-08-07
- Inventor: Steven C. Shannon , Jang Gyoo Yang , Matthew L. Miller , Kartik Ramaswamy , James P. Cruse
- Applicant: Steven C. Shannon , Jang Gyoo Yang , Matthew L. Miller , Kartik Ramaswamy , James P. Cruse
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: H03H7/38
- IPC: H03H7/38

Abstract:
Apparatus and methods are provided for a power matching apparatus for use with a processing chamber. In one aspect of the invention, a power matching apparatus is provided including a first RF power input coupled to a first adjustable capacitor, a second RF power input coupled to a second adjustable capacitor, a power junction coupled to the first adjustable capacitor and the second adjustable capacitor, a receiver circuit coupled to the power junction, a high voltage filter coupled to the power junction and the high voltage filter has a high voltage output, a voltage/current detector coupled to the power junction and a RF power output connected to the voltage/current detector.
Public/Granted literature
- US20110291771A1 APPARATUS FOR MULTIPLE FREQUENCY POWER APPLICATION Public/Granted day:2011-12-01
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