- 专利标题: Apparatus for multiple frequency power application
- 专利标题(中): 多频电源设备
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申请号: US13205933申请日: 2011-08-09
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公开(公告)号: US08237517B2公开(公告)日: 2012-08-07
- 发明人: Steven C. Shannon , Jang Gyoo Yang , Matthew L. Miller , Kartik Ramaswamy , James P. Cruse
- 申请人: Steven C. Shannon , Jang Gyoo Yang , Matthew L. Miller , Kartik Ramaswamy , James P. Cruse
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patterson & Sheridan, LLP
- 主分类号: H03H7/38
- IPC分类号: H03H7/38
摘要:
Apparatus and methods are provided for a power matching apparatus for use with a processing chamber. In one aspect of the invention, a power matching apparatus is provided including a first RF power input coupled to a first adjustable capacitor, a second RF power input coupled to a second adjustable capacitor, a power junction coupled to the first adjustable capacitor and the second adjustable capacitor, a receiver circuit coupled to the power junction, a high voltage filter coupled to the power junction and the high voltage filter has a high voltage output, a voltage/current detector coupled to the power junction and a RF power output connected to the voltage/current detector.
公开/授权文献
- US20110291771A1 APPARATUS FOR MULTIPLE FREQUENCY POWER APPLICATION 公开/授权日:2011-12-01
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