发明授权
- 专利标题: Method for measuring mirror index and apparatus thereof
- 专利标题(中): 测量镜面指标的方法及其装置
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申请号: US12213590申请日: 2008-06-20
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公开(公告)号: US08238641B2公开(公告)日: 2012-08-07
- 发明人: Kazuhisa Shibata , Hiroyuki Ishigaki
- 申请人: Kazuhisa Shibata , Hiroyuki Ishigaki
- 申请人地址: JP Himeji-shi, Hyogo
- 专利权人: ARC Harima Co., Ltd.
- 当前专利权人: ARC Harima Co., Ltd.
- 当前专利权人地址: JP Himeji-shi, Hyogo
- 代理机构: Smith Patent Office
- 主分类号: G06K9/00
- IPC分类号: G06K9/00 ; G01J3/42 ; G01N21/47 ; G01B11/30
摘要:
There is provided a method of evaluating quantitatively surface properties such as cleanness and quality of the surface of a work that has been evaluated in the past by visual appearance inspection. A determined pattern 14 is made from plural concentric circles arranged at a center of an object lens in a taking picture device 12. A front edge of a probe is in contact with the surface of a work by the probe 10 that is provided at a middle portion of a cylindrical case 11 in a vertical direction so that the surface of the work and the determined pattern face each other. The determined pattern is illuminated by light of a light source so that a reflected image of the determined pattern is projected onto the surface of the work. A picture of the reflected image is taken by the taking picture device. The resulted image data includes standard deviation of brightness distribution of the resulted image data positioned on radius lines extending in all directions to outside from a center of the ring pattern image. A relative value between the resulted standard deviation and the standard deviation of the amplitude of the brightness distribution of the image data on a plurality of lines of the criteria mirror surface is determined as the mirror index. The image clarity of the surface of the work is evaluated from the mirror index of the plurality of lines.
公开/授权文献
- US20090316959A1 Method for measuring mirror index and apparatus thereof 公开/授权日:2009-12-24
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