发明授权
- 专利标题： Smooth electrode and method of fabricating same
- 专利标题（中）： 平滑电极及其制造方法
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申请号： US11962494申请日： 2007-12-21
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公开(公告)号： US08242006B2公开(公告)日： 2012-08-14
- 发明人: Stanton Earl Weaver , Stacey Joy Kennerly , Marco Francesco Aimi
- 申请人： Stanton Earl Weaver , Stacey Joy Kennerly , Marco Francesco Aimi
- 申请人地址： US NY Niskayuna
- 专利权人： General Electric Company
- 当前专利权人： General Electric Company
- 当前专利权人地址： US NY Niskayuna
- 代理商 Mary Louise Gioeni
- 主分类号： H01L21/76
- IPC分类号： H01L21/76 ; H01L21/44 ; H01L21/28 ; H01L21/4763
摘要：
A smooth electrode is provided. The smooth electrode includes at least one metal layer having thickness greater than about 1 micron; wherein an average surface roughness of the smooth electrode is less than about 10 nm.
公开/授权文献
- US20120080214A1 SMOOTH ELECTRODE AND METHOD OF FABICATING SAME 公开/授权日：2012-04-05