Invention Grant
- Patent Title: Adjustable louvered plasma electron flood enclosure
- Patent Title (中): 可调百叶等离子体电子防洪罩
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Application No.: US12835138Application Date: 2010-07-13
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Publication No.: US08242469B2Publication Date: 2012-08-14
- Inventor: Neil K. Colvin
- Applicant: Neil K. Colvin
- Applicant Address: US MA Beverly
- Assignee: Axcelis Technologies, Inc.
- Current Assignee: Axcelis Technologies, Inc.
- Current Assignee Address: US MA Beverly
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01J37/317
- IPC: H01J37/317 ; H01J37/02

Abstract:
An apparatus is provided for reducing particle contamination in an ion implantation system. The apparatus has an enclosure having an entrance, an exit, and at least one louvered side having a plurality of louvers defined therein. A beamline of the ion implantation system passes through the entrance and exit, wherein the plurality of louvers of the at least one louvered side are configured to mechanically filter an edge of an ion beam traveling along the beamline. The enclosure can have two louvered sides and a louvered top, wherein respective widths of the entrance and exit of the enclosure, when measured perpendicular to the beamline, are generally defined by a position of the two louvered sides with respect to one another. One or more of the louvered sides can be adjustably mounted, wherein the width of one or more of the entrance and exit of the enclosure is controllable.
Public/Granted literature
- US20110012033A1 Adjustable Louvered Plasma Electron Flood Enclosure Public/Granted day:2011-01-20
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