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发明授权
US08242559B2 Integrated circuit system with a floating dielectric region and method of manufacture thereof 有权
具有浮动电介质区域的集成电路系统及其制造方法

Integrated circuit system with a floating dielectric region and method of manufacture thereof
摘要：
A method of manufacture of an integrated circuit system includes: providing a second layer between a first layer and a third layer; forming an active device over the third layer; forming the third layer to form an island region underneath the active device; forming the second layer to form a floating second layer with an undercut beneath the island region; and depositing a fourth layer around the island region and the floating second layer.
摘要（中）：

一种制造集成电路系统的方法包括：在第一层和第三层之间提供第二层; 在第三层上形成有源器件; 形成第三层以在有源器件下方形成岛状区域; 形成第二层以形成在岛区下方具有底切的浮动第二层; 以及围绕岛区域和浮动第二层沉积第四层。

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