发明授权
- 专利标题: System and method of testing humidity in a sealed MEMS device
- 专利标题(中): 在密封的MEMS器件中测试湿度的系统和方法
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申请号: US12577016申请日: 2009-10-09
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公开(公告)号: US08244092B2公开(公告)日: 2012-08-14
- 发明人: Brian J. Gally , Lauren Palmateer , Manish Kothari , William J. Cummings
- 申请人: Brian J. Gally , Lauren Palmateer , Manish Kothari , William J. Cummings
- 申请人地址: US CA San Diego
- 专利权人: QUALCOMM MEMS Technologies, Inc.
- 当前专利权人: QUALCOMM MEMS Technologies, Inc.
- 当前专利权人地址: US CA San Diego
- 代理机构: Knobbe, Martens, Olson & Bear LLP
- 主分类号: G02B6/00
- IPC分类号: G02B6/00
摘要:
One embodiment provides a method of testing humidity, comprising: i) determining a property of a device which encloses a plurality of interferometric modulators and ii) determining a relative humidity value or a degree of the relative humidity inside the device based at least in part upon the determined property, wherein the determined property comprises at least one of i) the thickness and width of a seal of the device and ii) adhesive permeability of a component of the device. In one embodiment, the determined property further comprises at least one of the following: i) temperature-humidity combination inside the device, ii) a desiccant capacity inside the device and iii) a device size.
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