发明授权
- 专利标题： Photometrically modulated delivery of reagents
- 专利标题（中）： 光度调制递送试剂
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申请号： US13085476申请日： 2011-04-12
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公开(公告)号： US08244482B2公开(公告)日： 2012-08-14
- 发明人: Jose I. Arno
- 申请人： Jose I. Arno
- 申请人地址： US CT Danbury
- 专利权人： Advanced Technology Materials, Inc.
- 当前专利权人： Advanced Technology Materials, Inc.
- 当前专利权人地址： US CT Danbury
- 代理机构： Hultquist, PLLC
- 代理商 Steven J. Hultquist; Maggie Chappuis
- 主分类号： H01L21/66
- IPC分类号： H01L21/66
摘要：
A process system adapted for processing of or with a material therein. The process system includes: a sampling region for the material; an infrared photometric monitor constructed and arranged to transmit infrared radiation through the sampling region and to responsively generate an output signal correlative of the material in the sampling region, based on its interaction with the infrared radiation; and process control means arranged to receive the output of the infrared photometric monitor and to responsively control one or more process conditions in and/or affecting the process system.
公开/授权文献
- US20110189797A1 PHOTOMETRICALLY MODULATED DELIVERY OF REAGENTS 公开/授权日：2011-08-04
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