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US08244494B2 Plasma insensitive height sensing 有权
等离子体不敏感的高度感测

Plasma insensitive height sensing
摘要:
A method for determining a distance between a first piece and a second piece includes measuring, at the first or second piece, a first signal at a first frequency, and measuring, at the first or second piece, a second signal at a second frequency. The second frequency is different from the first frequency. The distance is determined based on the measured first and second signals.
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