发明授权
- 专利标题： Combination of structure and an active damping system, and a lithographic apparatus
- 专利标题（中）： 结构和主动阻尼系统的组合，以及光刻设备
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申请号： US12267809申请日： 2008-11-10
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公开(公告)号： US08245824B2公开(公告)日： 2012-08-21
- 发明人: Hans Butler , Marc Wilhelmus Maria Van Der Wijst , Joost De Pee , Cornelius Adrianus Lambertus De Hoon , Stijn Boschker
- 申请人： Hans Butler , Marc Wilhelmus Maria Van Der Wijst , Joost De Pee , Cornelius Adrianus Lambertus De Hoon , Stijn Boschker
- 申请人地址： NL Veldhoven
- 专利权人： ASML Netherlands B.V.
- 当前专利权人： ASML Netherlands B.V.
- 当前专利权人地址： NL Veldhoven
- 代理机构： Pillsbury Winthrop Shaw Pittman LLP
- 主分类号： F16F7/10
- IPC分类号： F16F7/10 ; G03B27/42
摘要：
An active damping system to dampen a vibration of at least a part of the structure, including a device to determine a position quantity of the structure and an actuator to exert a force on the structure in dependency of the determined position quantity, wherein the device is a calculation device configured to calculate the position quantity of the structure on the basis of actuator signals.
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