发明授权
- 专利标题: Method for growing thin film
- 专利标题(中): 生长薄膜的方法
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申请号: US12417231申请日: 2009-04-02
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公开(公告)号: US08247031B2公开(公告)日: 2012-08-21
- 发明人: Young Joon Baik , Won Mok Kim , Kyeong Seok Lee , Jong-Keuk Park , Jeung-hyun Jeong , Suyoun Lee , Taek Sung Lee
- 申请人: Young Joon Baik , Won Mok Kim , Kyeong Seok Lee , Jong-Keuk Park , Jeung-hyun Jeong , Suyoun Lee , Taek Sung Lee
- 申请人地址: KR
- 专利权人: Korea Institute of Science and Technology
- 当前专利权人: Korea Institute of Science and Technology
- 当前专利权人地址: KR
- 代理机构: Cantor Colburn LLP
- 优先权: KR10-2008-0061513 20080627
- 主分类号: C23C16/00
- IPC分类号: C23C16/00 ; B05D1/36
摘要:
Disclosed is a method for growing a thin film, which includes modifying a surface grain size and surface roughness on a thin film to improve the mobility of a carrier and a light scattering effect. The method for growing a thin film includes: forming nuclei of grains having various grain orientations on a substrate; causing first grains having a first specific grain orientation to grow predominantly among the grains having various grain orientations, thereby forming a first preferred texture comprised of the predominantly grown first grains; and then causing second grains having a second grain orientation to grow predominantly, thereby forming a second preferred texture comprised of the predominantly grown second grains, wherein the surface grain size of each of the second grains forming the second texture is larger than that of each of the first grains forming the first texture.
公开/授权文献
- US20090324824A1 METHOD FOR GROWING THIN FILM 公开/授权日:2009-12-31
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