Invention Grant
- Patent Title: Nano structure fabrication
- Patent Title (中): 纳米结构制造
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Application No.: US12468300Application Date: 2009-05-19
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Publication No.: US08252189B2Publication Date: 2012-08-28
- Inventor: Kwangyeol Lee
- Applicant: Kwangyeol Lee
- Applicant Address: KR
- Assignee: Korea University Research and Business Foundation
- Current Assignee: Korea University Research and Business Foundation
- Current Assignee Address: KR
- Agency: Workman Nydegger
- Main IPC: B44C1/22
- IPC: B44C1/22 ; C25F3/00 ; H01L21/311 ; B05D1/32
Abstract:
A method for manufacturing a nano structure includes forming a stamp having a line pattern on a surface thereof, positioning the stamp upon a substrate, forming at least one protruded portion in the substrate substantially corresponding to the line pattern of the stamp, forming a protective coating layer on at least a portion of the at least one protruded portion, and removing a portion of the substrate by etching at least another portion of the at least one protruded portion not covered with the protective coating layer.
Public/Granted literature
- US20100294741A1 NANO STRUCTURE FABRICATION Public/Granted day:2010-11-25
Information query
