发明授权
- 专利标题: Non-volatile semiconductor storage device and method of manufacturing the same
- 专利标题(中): 非易失性半导体存储装置及其制造方法
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申请号: US12142289申请日: 2008-06-19
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公开(公告)号: US08253187B2公开(公告)日: 2012-08-28
- 发明人: Hiroyasu Tanaka , Ryota Katsumata , Masaru Kito , Yoshiaki Fukuzumi , Masaru Kido , Hideaki Aochi , Mitsuru Sato , Yasuyuki Matsuoka
- 申请人: Hiroyasu Tanaka , Ryota Katsumata , Masaru Kito , Yoshiaki Fukuzumi , Masaru Kido , Hideaki Aochi , Mitsuru Sato , Yasuyuki Matsuoka
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2007-163085 20070620
- 主分类号: H01L27/115
- IPC分类号: H01L27/115
摘要:
A non-volatile semiconductor storage device 10 has a plurality of memory strings 100 with a plurality of electrically rewritable memory transistors MTr1-MTr4 connected in series. The memory string 100 includes a columnar semiconductor CLmn extending in a direction perpendicular to a substrate, a plurality of charge accumulation layers formed around the columnar semiconductor CLmn via insulating films, and selection gate lines on the drain side SGD contacting the columnar semiconductor to configure transistors. The selection gate lines on the drain side SGD have lower selection gate lines on the drain side SGDd, each of which is arranged with an interval with a certain pitch, and upper selection gate lines on the drain side SGDu located on a higher layer than the lower selection gate lines on the drain side SGDd, each of which is arranged on gaps between the lower selection gate lines on the drain side SGDd.
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