发明授权
- 专利标题: In-liquid-substance detection sensor
- 专利标题(中): 液体物质检测传感器
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申请号: US12555894申请日: 2009-09-09
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公开(公告)号: US08256275B2公开(公告)日: 2012-09-04
- 发明人: Hajime Yamada , Naoko Aizawa , Yoshihiro Koshido , Koji Fujimoto , Toru Yabe , Michio Kadota
- 申请人: Hajime Yamada , Naoko Aizawa , Yoshihiro Koshido , Koji Fujimoto , Toru Yabe , Michio Kadota
- 申请人地址: JP Kyoto
- 专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人地址: JP Kyoto
- 代理机构: Keating & Bennett, LLP
- 优先权: JP2007-089317 20070329
- 主分类号: G01N29/00
- IPC分类号: G01N29/00
摘要:
An in-liquid-substance detection sensor that achieves size reduction and detection accuracy improvement includes a piezoelectric substrate, at least two SAW devices provided on one major surface of the piezoelectric substrate and each having at least one IDT electrode defining a sensing portion, outer electrodes provided on the other major surface of the piezoelectric substrate and electrically connected to the SAW devices through vias extending through the piezoelectric substrate, a channel-defining member provided on the one major surface of the piezoelectric substrate so as to surround the SAW devices and a region connecting the SAW devices to each other, thereby defining sidewalls of a channel, and a protective member bonded to the one major surface of the piezoelectric substrate with the channel-defining member interposed therebetween, thereby sealing the channel, the protective member having at least two through holes communicating with the channel.
公开/授权文献
- US20090320574A1 IN-LIQUID-SUBSTANCE DETECTION SENSOR 公开/授权日:2009-12-31
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