发明授权
- 专利标题: Nanoscale metal paste for interconnect and method of use
- 专利标题(中): 用于互连的纳米金属膏和使用方法
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申请号: US12019450申请日: 2008-01-24
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公开(公告)号: US08257795B2公开(公告)日: 2012-09-04
- 发明人: Guo-Quan Lu , Guangyin Lei , Jesus Calata
- 申请人: Guo-Quan Lu , Guangyin Lei , Jesus Calata
- 申请人地址: US VA Blacksburg
- 专利权人: Virginia Tech Intellectual Properties, Inc.
- 当前专利权人: Virginia Tech Intellectual Properties, Inc.
- 当前专利权人地址: US VA Blacksburg
- 代理机构: Blank Rome LLP
- 主分类号: B05D3/02
- IPC分类号: B05D3/02 ; B22F7/02
摘要:
A paste including metal or metal alloy particles (which are preferably silver or silver alloy), a dispersant material, and a binder is used to form an electrical, mechanical or thermal interconnect between a device and a substrate. By using nanoscale particles (i.e., those which are less than 500 nm in size and most preferably less than 100 nm in size), the metal or metal alloy particles can be sintered at a low temperature to form a metal or metal alloy layer which is desired to allow good electrical, thermal and mechanical bonding, yet the metal or metal alloy layer can enable usage at a high temperature such as would be desired for SiC, GaN, or diamond (e.g., wide bandgap devices). Furthermore, significant application of pressure to form the densified layers is not required, as would be the case with micrometer sized particles. In addition, the binder can be varied so as to insulate the metal particles until a desired sintering temperature is reached; thereby permitting fast and complete sintering to be achieved.
公开/授权文献
- US20090162557A1 NANOSCALE METAL PASTE FOR INTERCONNECT AND METHOD OF USE 公开/授权日:2009-06-25
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