发明授权
- 专利标题： Microwave anneal of a thin lamina for use in a photovoltaic cell
- 专利标题（中）： 用于光伏电池的薄层的微波退火
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申请号： US12636704申请日： 2009-12-11
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公开(公告)号： US08257995B2公开(公告)日： 2012-09-04
- 发明人: Mohamed M Hilali , Venkatesan Murali , Gopal Prabhu , Zhiyong Li
- 申请人： Mohamed M Hilali , Venkatesan Murali , Gopal Prabhu , Zhiyong Li
- 申请人地址： US CA San Jose
- 专利权人： Twin Creeks Technologies, Inc.
- 当前专利权人： Twin Creeks Technologies, Inc.
- 当前专利权人地址： US CA San Jose
- 代理机构： The Mueller Law Office
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; H01L21/30 ; H01L21/46 ; H01L21/78 ; H01L21/301
摘要：
A cleave plane is defined in a semiconductor donor body by implanting ions into the wafer. A lamina is cleaved from the donor body, and a photovoltaic cell is formed which comprises the lamina. The implant may cause some damage to the crystal structure of the lamina. This damage can be repaired by annealing the lamina using microwave energy. If the lamina is bonded to a receiver element, the receiver element may be either transparent to microwaves, or may reflect microwaves, while the semiconductor material absorbs the microwaves. In this way the lamina can be annealed at high temperature while the receiver element remains cooler.
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