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US08258031B2 Fabrication of a vertical heterojunction tunnel-FET 有权
垂直异质结隧道FET的制造

Fabrication of a vertical heterojunction tunnel-FET
摘要:
Exemplary embodiments include a method for fabricating a heterojunction tunnel field-effect-transistor (FET), the method including forming a gate region on a silicon layer of a silicon-on-insulator (SOI) substrate, forming a drain region on the silicon layer adjacent the gate region and forming a vertical heterojunction source region adjacent the gate region, wherein the vertical heterojunction source region generates a tunnel path inline with a gate field associated with the gate region.
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