发明授权
- 专利标题: Fabrication of a vertical heterojunction tunnel-FET
- 专利标题(中): 垂直异质结隧道FET的制造
-
申请号: US12815902申请日: 2010-06-15
-
公开(公告)号: US08258031B2公开(公告)日: 2012-09-04
- 发明人: Isaac Lauer , Amlan Majumdar , Paul M. Solomon , Steven J. Koester
- 申请人: Isaac Lauer , Amlan Majumdar , Paul M. Solomon , Steven J. Koester
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Cantor Colburn LLP
- 代理商 Vazken Alexanian
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L29/66
摘要:
Exemplary embodiments include a method for fabricating a heterojunction tunnel field-effect-transistor (FET), the method including forming a gate region on a silicon layer of a silicon-on-insulator (SOI) substrate, forming a drain region on the silicon layer adjacent the gate region and forming a vertical heterojunction source region adjacent the gate region, wherein the vertical heterojunction source region generates a tunnel path inline with a gate field associated with the gate region.
公开/授权文献
- US20110303950A1 FABRICATION OF A VERTICAL HETEROJUNCTION TUNNEL-FET 公开/授权日:2011-12-15
信息查询
IPC分类: