发明授权
US08259767B2 High-power quantum cascade lasers with active-photonic-crystal structure
有权
具有有源光子晶体结构的大功率量子级联激光器
- 专利标题: High-power quantum cascade lasers with active-photonic-crystal structure
- 专利标题(中): 具有有源光子晶体结构的大功率量子级联激光器
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申请号: US12639178申请日: 2009-12-16
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公开(公告)号: US08259767B2公开(公告)日: 2012-09-04
- 发明人: Dan Botez , Luke J. Mawst
- 申请人: Dan Botez , Luke J. Mawst
- 申请人地址: US WI Madison
- 专利权人: Wisconsin Alumni Research Foundation
- 当前专利权人: Wisconsin Alumni Research Foundation
- 当前专利权人地址: US WI Madison
- 代理机构: Bell & Manning, LLC
- 主分类号: H01S3/04
- IPC分类号: H01S3/04 ; H01S5/00 ; H01L21/00 ; H01L21/76
摘要:
Semiconductor laser array devices capable of emitting mid- to long-wavelength infrared (i.e., 4-12 μm) radiation are provided. The devices include a quantum cascade laser (QCL) structure comprising one or more active cores; an optical confinement structure; a cladding structure; and a plurality of laterally-spaced trench regions extending transversely through the optical confinement and cladding structures, and partially into the QCL structure. The trench regions, each of which comprises a lower trench layer comprising a semi-insulating material and an upper trench layer comprising a material having a refractive index that is higher than that of the semi-insulating material, define a plurality of laterally-spaced interelement regions separated by element regions in the laser array device.
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