Invention Grant
- Patent Title: Mass analysis magnet for a ribbon beam
- Patent Title (中): 质量分析用于带状束的磁体
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Application No.: US12616589Application Date: 2009-11-11
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Publication No.: US08263941B2Publication Date: 2012-09-11
- Inventor: Victor Benveniste , James S. Buff , Frank Sinclair , Joseph C. Olson
- Applicant: Victor Benveniste , James S. Buff , Frank Sinclair , Joseph C. Olson
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01J49/20
- IPC: H01J49/20
Abstract:
A ribbon beam mass analyzer having a first and second solenoid coils and steel yoke arrangement. Each of the solenoid coils have a substantially “racetrack” configuration defining a space through which an ion ribbon beam travels. The solenoid coils are spaced apart along the direction of travel of the ribbon beam. Each of the solenoid coils generates a uniform magnetic field to accommodate mass resolution of wide ribbon beams to produce a desired image of ions generated from an ion source.
Public/Granted literature
- US20100116983A1 MASS ANALYSIS MAGNET FOR A RIBBON BEAM Public/Granted day:2010-05-13
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