Invention Grant
US08264154B2 Method and apparatus for pulsed plasma processing using a time resolved tuning scheme for RF power delivery
有权
使用用于RF功率传送的时间分辨调谐方案进行脉冲等离子体处理的方法和装置
- Patent Title: Method and apparatus for pulsed plasma processing using a time resolved tuning scheme for RF power delivery
- Patent Title (中): 使用用于RF功率传送的时间分辨调谐方案进行脉冲等离子体处理的方法和装置
-
Application No.: US12465319Application Date: 2009-05-13
-
Publication No.: US08264154B2Publication Date: 2012-09-11
- Inventor: Samer Banner , Valentin Todorow , Kartik Ramaswamy
- Applicant: Samer Banner , Valentin Todorow , Kartik Ramaswamy
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: H01J7/24
- IPC: H01J7/24

Abstract:
Embodiments of the present invention generally provide methods and apparatus for pulsed plasma processing over a wide process window. In some embodiments, an apparatus may include an RF power supply having frequency tuning and a matching network coupled to the RF power supply that share a common sensor for reading reflected RF power reflected back to the RF power supply. In some embodiments, an apparatus may include an RF power supply having frequency tuning and a matching network coupled to the RF power supply that share a common sensor for reading reflected RF power reflected back to the RF power supply and a common controller for tuning each of the RF power supply and the matching network.
Public/Granted literature
Information query