Invention Grant
US08264154B2 Method and apparatus for pulsed plasma processing using a time resolved tuning scheme for RF power delivery 有权
使用用于RF功率传送的时间分辨调谐方案进行脉冲等离子体处理的方法和装置

Method and apparatus for pulsed plasma processing using a time resolved tuning scheme for RF power delivery
Abstract:
Embodiments of the present invention generally provide methods and apparatus for pulsed plasma processing over a wide process window. In some embodiments, an apparatus may include an RF power supply having frequency tuning and a matching network coupled to the RF power supply that share a common sensor for reading reflected RF power reflected back to the RF power supply. In some embodiments, an apparatus may include an RF power supply having frequency tuning and a matching network coupled to the RF power supply that share a common sensor for reading reflected RF power reflected back to the RF power supply and a common controller for tuning each of the RF power supply and the matching network.
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