发明授权
- 专利标题: System and method for detecting mask data handling errors
- 专利标题(中): 用于检测掩码数据处理错误的系统和方法
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申请号: US12141543申请日: 2008-06-18
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公开(公告)号: US08266553B1公开(公告)日: 2012-09-11
- 发明人: Bang-Thu Nguyen , Yan Wang , Hong-tsz Pan , Xin Wu
- 申请人: Bang-Thu Nguyen , Yan Wang , Hong-tsz Pan , Xin Wu
- 申请人地址: US CA San Jose
- 专利权人: Xilinx, Inc.
- 当前专利权人: Xilinx, Inc.
- 当前专利权人地址: US CA San Jose
- 代理商 Kenneth Glass; Thomas George; Gerald Chan
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
An integrated circuit device layout and a method for detecting mask data handling errors are disclosed in which integrated circuit device layout includes a device region in which operable circuitry is disposed. Integrated circuit device layout also includes a verification region in which verification elements are disposed. The verification elements include cells that are duplicates of at least some of the different types of cells in device region and can include structures that are duplicates of at least some of the types of structures in the device region. The patterns in verification region are used in the final verification process to identify mask data handling errors in a mask job deck. Because the patterns in verification region are easy to locate and identify, the time required to perform the final verification process is reduced and the chance of error in the final verification process is reduced.