发明授权
US08267611B2 Optical structure comprising elastic suspension and method of producing such a structure 有权
包括弹性悬浮液的光学结构和制造这种结构的方法

Optical structure comprising elastic suspension and method of producing such a structure
摘要:
An optical structure comprising a first and a second component and a connecting element which connects the two components and which has at least two spring elements. The two components have an extremely high level of positional and angular accuracy relative to each other even with major fluctuations in temperature and each spring element has a spring constant at least twice as great in two respective mutually perpendicular spatial directions as in the third spatial direction perpendicular to the first two spatial directions, referred to as the elasticity direction, wherein the two spring elements have elasticity directions which do not extend parallel to each other.
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