发明授权
- 专利标题: Transparent transistor with multi-layered structures and method of manufacturing the same
- 专利标题(中): 具有多层结构的透明晶体管及其制造方法
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申请号: US12554066申请日: 2009-09-04
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公开(公告)号: US08269220B2公开(公告)日: 2012-09-18
- 发明人: Min Ki Ryu , Chi Sun Hwang , Chun Won Byun , Hye Yong Chu , Kyoung Ik Cho
- 申请人: Min Ki Ryu , Chi Sun Hwang , Chun Won Byun , Hye Yong Chu , Kyoung Ik Cho
- 申请人地址: KR Daejeon
- 专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人地址: KR Daejeon
- 代理机构: Rabin & Berdo, P.C.
- 优先权: KR10-2008-0131647 20081222
- 主分类号: H01L29/04
- IPC分类号: H01L29/04
摘要:
Provided is a transparent transistor including a substrate, source and drain electrodes formed on the substrate, each having a multi-layered structure of a lower transparent layer, a metal layer and an upper transparent layer, a channel formed between the source and drain electrodes, and a gate electrode aligned with the channel. Here, the lower transparent layer or the upper transparent layer is formed of a transparent semiconductor layer, which is the same as the channel. Thus, the use of the multi-layered transparent conductive layer can ensure transparency and conductivity, overcome a problem of contact resistance between the source and drain electrodes and a semiconductor, and improve processibility by patterning the multi-layered transparent conductive layer all at once, while deposition is performed layer by layer.
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